JPH085548Y2 - 薄膜形成装置 - Google Patents
薄膜形成装置Info
- Publication number
- JPH085548Y2 JPH085548Y2 JP5228190U JP5228190U JPH085548Y2 JP H085548 Y2 JPH085548 Y2 JP H085548Y2 JP 5228190 U JP5228190 U JP 5228190U JP 5228190 U JP5228190 U JP 5228190U JP H085548 Y2 JPH085548 Y2 JP H085548Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- terminal
- rotating shaft
- thin film
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims description 29
- 238000007789 sealing Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000000428 dust Substances 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5228190U JPH085548Y2 (ja) | 1990-05-18 | 1990-05-18 | 薄膜形成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5228190U JPH085548Y2 (ja) | 1990-05-18 | 1990-05-18 | 薄膜形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0412632U JPH0412632U (en]) | 1992-01-31 |
JPH085548Y2 true JPH085548Y2 (ja) | 1996-02-14 |
Family
ID=31572454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5228190U Expired - Fee Related JPH085548Y2 (ja) | 1990-05-18 | 1990-05-18 | 薄膜形成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH085548Y2 (en]) |
-
1990
- 1990-05-18 JP JP5228190U patent/JPH085548Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0412632U (en]) | 1992-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |